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How do the electron beam writing and metal deposition affect the properties of graphene during device fabrication?

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Nanoscale, 2013, Advance Article
DOI: 10.1039/C3NR33460K, Paper
Xiaonan Shen, Haomin Wang, Ting Yu
Study on the electron beam lithography and contact metal deposition effects on the properties of graphene during device fabrication by Raman spectroscopy.
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