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Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon

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Nanoscale, 2012, 4,7532-7539
DOI: 10.1039/C2NR32350H, Paper
Prayudi Lianto, Sihang Yu, Jiaxin Wu, C. V. Thompson, W. K. Choi
Stability of isolated metal catalysts for vertical metal-assisted chemical etching of silicon depends on etch chemistry and catalyst spacing.
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