Fabrication of complex 3-dimensional patterned structures on a ~10 nm scale from a single master pattern by secondary sputtering lithography.

, 2013, Accepted Manuscript
DOI: 10.1039/C3NR33739A, Paper

Hwan-Jin Jeon, Hae-Wook Yoo, Eun Hyeong Lee, Sung Woo Jang, Jong Seon Kim, Jong Kil Choi, Hee-Tae Jung
We describe a highly efficient method for fabricating a variety of complex 3D nano-patterns from a single master pattern using secondary sputtering lithography that is a 10nm scale patterning method...
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